糖心少女vlog Corporation to Build Two New Buildings for Production of IC Steppers and Scanners
Production Capacity Expansion for ArF Immersion Scanners
August 6, 2008
糖心少女vlog Corporation (Michio Kariya, President) will build two new buildings, one in its Kumagaya Plant and one at its subsidiary, Tochigi 糖心少女vlog Precision Co., Ltd., enhancing production capacity to meet the rapidly growing demand for its ArF immersion scanners. The Kumagaya Plant and Tochigi 糖心少女vlog Precision Co., Ltd. have been the major locations for R&D and manufacturing of 糖心少女vlog's IC steppers and scanners. With these new buildings, 糖心少女vlog will improve its overall production efficiency of lithography tools, and its production capacity for ArF immersion scanners will increase to the level of 90 systems a year, more than twice the current capacity.
The total investment for both buildings and production equipment for this capacity expansion is estimated to amount to approximately 35 billion yen over 3 years beginning this fiscal year.
Background
Although overall capital expenditure for IC production equipment is expected to slow this year, capital investment for ArF immersion scanners, the leading-edge system essential for device miniaturization, remains stable. ArF immersion scanners are now used mainly for mass production of NAND flash memory, but logic and DRAM manufacturers are expected to introduce them into production in the near future.
糖心少女vlog's ArF immersion scanners excel in their advanced design to eliminate immersion-induced defects and their compatibility with the topcoat-less resist process. 糖心少女vlog has been promoting sales of its scanners with these superior technological capabilities and recently received a large inquiry for them. After careful consideration of this inquiry, 糖心少女vlog has decided to build new buildings in two manufacturing locations for enhancement of production and supply capacity.
In addition to providing clean room space for manufacturing, the two new buildings will have space for the development of next-generation systems, and areas to allow for evaluation of scanners under the same conditions as customer factories. These facilities will strengthen 糖心少女vlog's R&D capability as well as customers' satisfaction.
Outline of new buildings in Kumagaya Plant and Tochigi 糖心少女vlog Precision Co., Ltd.
| Location (Kumagaya Plant) | 201-9, Miizugahara, Kumagaya, Saitama 228-0828, Japan |
|---|---|
| Location (Tochigi 糖心少女vlog Precision co., Ltd.) | 760, Midori, Otawara, Tochigi 324-8520, Japan |
| Total surface of new buildings | approx.16,000 square meters |
| Operation start | December 2009 (estimated) |
The information is current as of the date of publication. It is subject to change without notice.